Develop skills for use in computer engineering or sensor design applications.
Build on your professional expertise in electrical engineering, micro-system technology,
or computer engineering. The average computer engineer salary is well over $100,000
per year. Learn micromachining and microfabrication techniques. Design VLSI circuits
using CAD tools. Study principles of solid-state devices at micro- and nano-scale
dimensions.
3 courses in 3 semesters.
| Length |
3 courses in 2-3 semesters |
| Effort |
3 hours per credit per week |
| Each course |
3 credits |
| Total credits |
9 |
| Course type |
Online or on-campus |
| Modality |
Watch class recordings on demand |
| Cost |
Based on credits and course type |
| Already enrolled? |
Speak with your advisor. |
Apply
Progress quickly with a compact curriculum.
Work with the program advisor to select courses that fit your interests and pre-requisite
skills.
Check your preparation.
Here are some of the pre-requisite courses for this certificate.
EE 2174 - Digital Logic and Lab
Introduces analysis, design, and application of digital logic. Includes Boolean algebra, binary numbers, logic gates, combinational and sequential logic, storage elements and hardware-description-language based synthesis.
- Credits:
4.0
- Lec-Rec-Lab: (3-0-2)
- Semesters Offered:
Fall, Spring, Summer
- Pre-Requisite(s): CS 1121 or CS 1131 or CS 1111
Covers the fundamentals of electronic devices and circuits; operational amplifiers, bipolar junction transistors, diodes, and MOSFETs.
- Credits:
4.0
- Lec-Rec-Lab: (3-0-2)
- Semesters Offered:
Fall, Spring, Summer
- Pre-Requisite(s): EE 2112 or EE 3010
EE 4240 - Introduction to MEMS
Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
MSE 4240 - Introduction to MEMS
Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
Design of VLSI circuits using CAD tools. Analysis of physical factors affecting performance.
- Credits:
4.0
- Lec-Rec-Lab: (3-0-2)
- Semesters Offered:
Fall
- Pre-Requisite(s): EE 3131 and EE 2174
CS 4321 - Introduction to Algorithms
Fundamental topics in algorithm design, analysis, and implementation. Analysis fundamentals include asymptotic notation, analysis of control structures, solving recurrences, and amortized analysis. Design and implementation topics include sorting, searching, and graph algorithms. Design paradigms include greedy algorithms, divide-and-conquer algorithms, and dynamic programming.
- Credits:
3.0
- Lec-Rec-Lab: (0-3-0)
- Semesters Offered:
Fall, Spring
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore
- Pre-Requisite(s): (CS 2311 or MA 3210) and CS 2321
Take 9 credits of elective courses.
Some courses have dual offerings in electrical engineering (EE) and materials science
and engineering (MSE). Do not take both dual offerings. Take a maximum of three credits
at the 4000-level.
Design of VLSI circuits using CAD tools. Analysis of physical factors affecting performance.
- Credits:
4.0
- Lec-Rec-Lab: (3-0-2)
- Semesters Offered:
Fall
- Pre-Requisite(s): EE 3131 and EE 2174
EE 4240 - Introduction to MEMS
Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
MSE 4240 - Introduction to MEMS
Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
EE 5430 - Electronic Materials
A study of the physical principles of electronic materials, their applications in solid-state devices, and future trends in their development.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Fall
- Restrictions:
Must be enrolled in one of the following Level(s): Graduate
MSE 5430 - Electronic Materials
A study of the physical principles of electronic materials, their applications in solid-state devices, and future trends in their development.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Fall
- Restrictions:
Must be enrolled in one of the following Level(s): Graduate
EE 5460 - Solid State Devices
A study of the physical principles and evolution of solid-state devices, such as transistors: from conventional to novel types utilizing hetero-junctions and quantum effects; light emitting devices, semiconductor lasers; and displays of various types.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Spring
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
MSE 5460 - Solid State Devices
A study of the physical principles and evolution of solid-state devices, such as transistors: from conventional to novel types utilizing hetero-junctions and quantum effects; light emitting devices, semiconductor lasers; and displays of various types.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Spring
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
EE 5470 - Semiconductor Fabrication
Graduate level introduction to the science and engineering of semiconductor device fabrication.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
MSE 5470 - Semiconductor Fabrication
Graduate level introduction to the science and engineering of semiconductor device fabrication.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Fall
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
EE 5471 - Microfabrication Laboratory
A hands-on laboratory experience in which the students fabricate devices with micro-and nano- scale dimensions. Lecture component covers safety training, background on microfabrication processes and systems, and facility tours to observe additional systems.
- Credits:
2.0
- Lec-Rec-Lab: (1-0-3)
- Semesters Offered:
Fall, Spring
- Restrictions:
Permission of instructor required;
Must be enrolled in one of the following Level(s): Graduate
This course will cover advanced topics dealing with MEIXIS technologies, transduction mechanisms, and microfabricated sensors and actuators.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Spring
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
- Pre-Requisite(s): EE 4240 or MY 4240
This course will cover advanced topics dealing with MEIXIS technologies, transduction mechanisms, and microfabricated sensors and actuators.
- Credits:
4.0
- Lec-Rec-Lab: (3-1-0)
- Semesters Offered:
Spring
- Restrictions:
May not be enrolled in one of the following Class(es): Freshman, Sophomore, Junior
- Pre-Requisite(s): EE 4240 or MY 4240 or MSE 4240
EE 5780 - Advanced VLSI Computer-Aided Design
Nanoscale chip design presents issues for IC designs and new market areas for design automation. This course provides a comprehensive introduction on layout design. Advanced algorithms and optimization techniques are presented to give students the skills needed for nanometer VLSI design.
- Credits:
3.0
- Lec-Rec-Lab: (3-0-0)
- Semesters Offered:
Spring
- Restrictions:
Must be enrolled in one of the following Level(s): Graduate
- Pre-Requisite(s): CS 4321 and EE 4271
The minimum completion time is two semesters.
Here is a typical schedule.
| Fall |
Spring |
EE/MSE 4240
EE/MSE 5470 |
EE/MSE 5480 |
- Check the schedule of online classes to see which of your required or elective courses are available for upcoming semesters.
- Consult the academic calendar for fall and spring instruction start dates.
- Estimate costs based on tuition and online fees.
- Apply to the Graduate School for fall or spring semester.
- Review MTU Flex announcements related to the Graduate School.
- Check the schedule of classes to see which of your required or elective courses are available for upcoming semesters.
- Consult the academic calendar for fall and spring instruction start dates.
- Estimate costs based on tuition.
- Apply to the Graduate School for fall or spring semester.
Interested in taking a single, online course? Enroll as a non-degree seeking student.
Upon completion of the Certificate the student should be able to:
- Demonstrate knowledge of microelectromechanical systems and electronics materials.
Students receiving this certificate will have demonstrated the ability to solve open-ended
problems in electronic materials and processing from fundamental principles, and be
able to apply their solution to real world problems.
Michigan Tech was founded in 1885.
The University is accredited by the Higher Learning Commission and widely respected
by fast-paced industries, including automotive development, infrastructure, manufacturing,
and aerospace. Michigan Tech graduates deliver on rapid innovation and front-line
research, leaning into any challenge with confidence.
The College of Engineering fosters excellence in education and research.
We set out as the Michigan Mining School in 1885 to train mining engineers to better
operate copper mines. Today, more than 60 percent of Michigan Tech students are enrolled
in our 17 undergraduate and 29 graduate engineering programs across nine departments.
Our students and curriculum embrace the spirit of hard work and fortitude our founders
once had. Our online graduate courses are the same, robust classes taken by our doctorate
and masters candidates, taught directly by highly regarded faculty, with outstanding
support from staff. We invite working professionals to join these courses, bring their
own experience and challenges as part of the discussion. Leverage the national reputation
of Michigan Tech to advance your career in tech leadership.
Meet the online certified instructors.
Students have the flexibility to review class recordings later.
Teaching Statement
Dr. Bergstrom teaches electronics, introductory MEMS, and advanced MEMS.
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Teaching Statement
Dr. Semouchkina teaches courses in electronic materials and devices, solid state devices, physical electronics, and electromagnetics.
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