FE-SEM Shut Down

Stage Lock switch icon.

1. Release the Stage Lock if it is in.


Stage control icon.

2. Click on the Stage Control icon. In the Stage Control window, select the home position. Stage icon.


Column setup icon.

3. Use the Column Set Up menu to return the working distance to 12 mm. Manually set the working distance back to 12. NOTE: DO NOT CHANGE THE WORKING DISTANCE UNTIL THE STAGE LOCK HAS BEEN RELEASED. Column icon.


HV set icon.

4. Turn off HV. 


Handle MV1 icon.

5. Turn the handle counterclockwise to open MV1.


Loading sample icon.

6. Screw the rod into the specimen holder.


7. Pull the rod out until it locks into place and close MV1.


Chamber evac icon.

8. Press the AIR button to vent the chamber. Open the chamber and unscrew the specimen holder. Lock the rod into place. 


9. Close the door and hit the EVAC button. 


Chamber camera icon.

10. Turn off the chamber camera.


11. Remember to swipe out of the computer logging system.


Imaging Techniques