FE-SEM Front Panel

Emergency off button

Emergency Off Button

Safely shuts down the FE-SEM in an emergency.


Evac power switch

EVAC POWER Switch

Switch is set at 1 (ON) for Preliminary Operation.


DP TMP water and air pres lamps

DP/TMP, WATER, and AIR PRES Lamps

Should be lit during Preliminary Operation.


Obj apt switch

OBJ. APT. Switch

Set to HEAT for Preliminary Operation. The aperture is heated to about 150 degrees Celsius. This removes over 90% of the contaminants that would be present at room temperature.


IP1, IP2, and IP3 lamps

IP1, IP2, and IP3 Lamps

Should be lit during Preliminary Operation.


Ion pump readings

Ion Pump Readings

During Preliminary Operation, these should read better than the following:

IP1: 2 x 10-7 Pa

IP2: 2 x 10-6 Pa

IP3: 7 x 10-5 Pa


Chamber vacuum lamps

Chamber Vacuum Lamps

Specimen Chamber (S. C.) and Specimen Evacuation Chamber (S. E. C) HIGH lamps should be lit during Preliminary Operation (not shown here).


SC SEC vacuum meter

SC/SEC Vacuum Meter


Gun valve

Gun Valve

Switch is set to AUTO and the OPEN lamp is flickering during Preliminary Operation (not shown).


Chamber vacuum switches

Chamber Vacuum Switches

EVAC and AIR for Specimen Chamber (S. C) and Specimen Evacuation Chamber (S. E. C).


External Components: Control Board