Microfabrication Shared Facility

Electrical Characterization

Minerals and Materials Engineering Building (M&M) 424


Electrical Device Characterization

A probe station is available for connecting to electrical devices with contact pads down to 50 µm × 50 µm. There are four micromanipulators for making contact to samples. The probe station is also equipped with a microscope and a fiber light. For measuring the device parameters there is a Keithley 4200A-SCS Parameter Analyzer with preprogrammed recipes for typical electrical devices, such as diodes or MOSFETS. The Keithley 4200A-SCS has:

  • (4) Source measure unit Modules
  • (1) 4210-CVU Capacitance-Voltage Module
  • 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips
Electrical Device Characterization
 Electrical Device Characterization
Electrical Device Characterization, closer view
 Electrical Device Characterization

Wire Bonder

A K&S gold wire bonder is available for making connections between sample contact pads (300 × 300 µm2) and external connection pads.

Wire Bonder
 Wire Bonder

Four Point Measurement System

A four point measurement system is available for determining the sheet resistance of doped layers or for thin films to determine their resistivity.

Four Point Measurement System
 Four Point Measurement System