The Perkin Elmer PHI-660 scanning Auger microprobe can be used for the compositional
analysis of specimen surfaces using Auger electron spectroscopy (AES). The probe depth
of AES is on the order of only a few atomic layers, making it possible to execute
compositional analysis with sub micron spatial resolution. AES is capable of detecting
elements with atomic number three through fifty, but it is more sensitive to lighter
Additionally, the depth distribution of components at and near the surface can be
determined using AES in conjunction with inert ion sputtering. The microprobe software
package includes AugerScan, for auger electron acquisition and data manipulation,
and AugerMap, for scan control and element mapping.
This facility utilizes a scanning Auger microprobe, which allows for analysis of surface
composition using Auger electron spectroscopy (AES) with a submicron spatial resolution.
This microprobe is used to produce:
secondary electron images of surfaces
elemental line scans and maps
and depth profiles.
The depth distribution of components at and near the surface can be evaluated by using
AES in conjunction with inert ion sputtering.
Auger spectra are obtained from the detection of emitted X-ray and Auger electrons,
each of which possess energies characteristic of the parent element.
AES can detect all elements except H and He and.
AES is most sensitive to light elements. The spectra, however, are only representative
of the elements in the topmost atomic layers.
The inert ion sputtering process uses an ion gun to accelerate inert gas ions toward
the sample surface, removing the near surface atoms.
Sputtering can be used in combination with AES to produce elemental depth profiles
which are useful in determining the thickness of the compositional layers nearest
The Phi660 was upgraded by RBD Instruments in 2002. The upgrade includes new computer control boards, cabling and software.
The modern Windows-based software package includes AugerScan for auger electron acquisition and data manipulation as well as AugerMap for scan control and elemental mapping.
Michigan Tech offers many undergraduate and graduate courses related to materials