SCS Parylene Labcoter 2

SCS Parylene Labcoter 2

Location

Minerals and Materials Engineering Building (M&M) 432

Contact

Paul Bergstrom

microfabrication@mtu.edu

906-487-2058

Access Type

FOM

Instrument Details

The SCS Labcoter® 2 vacuum deposition tool is specifically designed for Parylene conformal coatings. Parylene-C is vaporized under vacuum and then drawn into the deposition chamber to deposit a layer of parylene. Parylene coatings are inert and biocompatible. They have excellent moisture, chemical, and dielectric barrier properties.

Note: Samples often require surface treating in a silane solution to ensure good adhesion, before loading into the high vacuum chamber.

Support Feature

  • Parylene-C precursor

 

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