Location
Minerals and Materials Engineering Building (M&M) 429
Contact
Ryan Bischer
989-225-2141
Access Type
Description
The EV620 aligner performs pattern transfer into photoresist on a substrate using ultraviolet light.
Minerals and Materials Engineering Building (M&M) 429
Ryan Bischer
989-225-2141
The EV620 aligner performs pattern transfer into photoresist on a substrate using ultraviolet light.