Location
Minerals and Materials Engineering Building (M&M) 432
Contact
906-487-2058
Access Type
Support Features
- Water-cooled crucible holder that can hold four
- 7cc crucible liners
- Six-inch rotatable substrate holder
- Quartz crystal thickness monitor
- Current source materials: Co, Ni, Fe, Pt, Ti, SiO2, Cr, Au, Al, Si, and Cu