Hummer 6.2 Sputtering System, Anatech (Plasma Cleaner)

Hummer 6.2 Sputtering System

Location

Minerals and Materials Engineering Building 637

Contact

Erico Freitas

efragafr@mtu.edu

Cell: 906-299-2714

Joey Tomei

Access Type

FOM

 

Instrument Details

The Hummer 6.2 Sputtering System by Anatech is a vacuum coating instrument used for applying thin, uniform metal coatings to samples, often for scanning electron microscopy (SEM). It operates through a sputter coating process, a cold method that uses ions to dislodge metal atoms from a source and deposit them onto a specimen. The "plasma cleaner" refers to the system's ability to use plasma in a separate "Plasma Mode" to clean and prepare a sample's surface before coating. 

Capabilities

  • Plasma etching
  • Plasma cleaner for TEM and SEM specimens

Vendor

Hummer

Training Doc

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