Hummer 6.2 Sputtering System, Anatech (Plasma Cleaner)

Hummer 6.2 Sputtering System

Location

Minerals and Materials Engineering Building 637

Contact

Erico Freitas

Joey Tomei

Access Type

FOM

 

Instrument Details

The Hummer 6.2 Sputtering System by Anatech is a vacuum coating instrument used for applying thin, uniform metal coatings to samples, often for scanning electron microscopy (SEM). It operates through a sputter coating process, a cold method that uses ions to dislodge metal atoms from a source and deposit them onto a specimen. The "plasma cleaner" refers to the system's ability to use plasma in a separate "Plasma Mode" to clean and prepare a sample's surface before coating. 

Capabilities

  • Plasma etching
  • Plasma cleaner for TEM and SEM specimens

Vendor

Hummer

Training Doc