Use Rates

The MFF, a non-profit facility supported exclusively by users, has an electronic logging system. It is currently interlocked to 90 percent of the systems that are used regularly and have associated use rates. Only users who are signed off to use a system will have an electronic (e-logger) account, enabling them to unlock the systems for which they are trained. To accurately track use, you are required to:

  • LOG IN to a system before starting use.
  • LOG OUT once the system is back in its idle state.
  • Additionally, TRACK activity in the log book. A user does this in case they forget to logout, otherwise the time recorded by the electronic logger will be the time charged.
  • To resolve use fee ERRORS you must bring them to the attention of the managing director as soon as possible.

Rates are currently posted for internal users. Overhead is added to these rates, depending upon the grant contract. Rates were last approved on October 17, 2016. Users should check back each fiscal year for updates. Please review the equipment status before using.

Service or Instrument Rate Notes

Staff Time

$45/hr + Fringe

6" Sputter  deposition

$42.50/hr

3 hr Cap

8" Sputter deposition

$42.50/hr

3 hr Cap

Denton e-beam deposition

$42.50/hr

Fredrick e-beam deposition

$42.50/hr

Parylene Coater

$20.50/hr

TRION

$42.50/hr

CAIBE

$42.50/hr

March

$20.50/hr

Ellipsometer

$20.50/hr

FTIR

Free

Needs calibrating

Curvature System

Free

Needs calibrating

Oxidation Furnace

$20.50/hr

Diffusion Furnace

$20.50/hr

2" Furnace

$20.50/hr

RTP

$20.50/hr

Dicing Saw

$20.50/hr

EVG 620 Mask Aligner

$70.50/hr

Wet bench - Chemical processing

$20.50/hr

Vacuum oven

$20.50/hr

$100 for overnight 6 p.m. to 8 a.m.

Hotplates

Free

Spinner

$20.50/hr

Wire bonder

$20.50/hr

Cleanroom optical Microscopy

$20.50/hr

Probe station

Free

Parameter Analyzer

Free

Capacitance Voltage Measurement

Free

Four point conductivity

Free

Rates will have overhead added at billing. The overhead rate depends on the type of index, such as internal, NSF, DOD, or industry.