Electron Optics Facility


The JEOL JSM-6400 SEM is a research grade tungsten source scanning electron microscope with EDS and WDS.



The JEOL JSM-6400 is a research grade tungsten source scanning electron microscope. It is configured with several sophisticated accessories, including an ultra thin window energy dispersive X-ray spectrometer, three WDS spectrometers, and a Geller dSspec automation system controlling the spectrometers and motorized stage. This microanalysis package is used for surface morphology and composition studies on a wide variety of organic and inorganic materials.

Full view of the SEM instrument.


  • Imaging modes include secondary electrons, backscattered electrons and X-rays.
  • Under ideal conditions, resolution in secondary electron imaging mode is 5 nm.
  • Images can be recorded with digital image capture through the Geller dPict module with subsequent output to a 1200 dpi laser printer.
  • GellerCharacteristic X-rays can be detected from as little as a 1 cubic micrometer volume of the specimen.
  • Elements from atomic number 5 (B) to 92 (U) can be detected in concentrations above 0.001 wt% element.
  • Analysis modes include qualitative, standardless, and fully rigorous standards-based quantitative analysis.
  • Additional capabilities of the Geller software package include analog and digital X-ray mapping and report generation.
  • Both analog and digital X-ray or compositional mapping are available.
  • The Geller automation/analysis system is interfaced to the campus network so all user data can be downloaded to user storage system from the laboratory.


  • JEOL USA is a leading supplier of scanning electron microscopes, transmission electron microscopes, scanning probe microscopes, mass spectrometers, NMR spectrometers, and semiconductor tools for scientific and industrial purposes.
  • Geller MicroÅnalytical Laboratory, Inc. provides analytical services and design and manufacturing of a limited number of unique products that are directly related to microanalysis, including computer control systems used in ACMAL.
  • 4pi Analysis, Inc. engineers and sells X-ray Microanalysis and Digital Imaging Systems. (NOTE: 4pi has ceased manufacturing and sales. ACMAL is confident that this will not affect 4pi’s ability to provide technical support to this lab.)

A research micrograph is shown for the SEM



Free online eTraining is available for this instrument. This self-paced tutorial and reference content does not replace course requirements for authorized usage.

Available topics related to this instrument:


Michigan Tech offers many undergraduate and graduate courses related to materials characterization.

Some of these courses offers direct, hands-on training in scanning electron microscopy.

MSE 4530 - Scanning Electron Microscopy and X-ray Microanalysis

Topics include electron beam and image formation, beam- specimen interactions, and x-ray microanalysis. Course content is relevant to students of the physical sciences, engineering, and related disciplines. Includes a laboratory experience that provides hands-on practical training sufficient to enable independent use of the SEM.

  • Credits: 3.0
  • Lec-Rec-Lab: (2-0-3)
  • Semesters Offered: Fall, Spring
  • Restrictions: Must be enrolled in one of the following Class(es): Junior, Senior